Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7001470 | Cleaning process for photomasks | Koji Tange, Yoshikazu Nagamura, Yasutaka Kikuchi, Yuki Oomasa, Koichi Kido | 2006-02-21 |
| 6841314 | Method of manufacturing a photomask | — | 2005-01-11 |
| 6620557 | Photo-mask, photo-mask pair, semiconductor device and method of manufacturing a semiconductor device | Masayoshi Mori | 2003-09-16 |
| 6537709 | Photo mask having film formed from halftone material, method of manufacturing photo mask, and method of manufacturing semiconductor device | Kouji Tange | 2003-03-25 |
| 6503852 | Manufacturing process for semiconductor device, photomask, and manufacturing apparatus for semiconductor device | Satoshi Aoyama | 2003-01-07 |
| 6433437 | Manufacturing process for semiconductor device, photomask, and manufacturing apparatus for semiconductor device | Satoshi Aoyama | 2002-08-13 |
| 6340543 | Photomask, manufacturing method thereof, and semiconductor device | Yoshikazu Nagamura, Kazuhito Suzuki, Nobuyuki Yoshioka | 2002-01-22 |
| 6338923 | Photolithography mask having monitoring marks and manufacturing method thereof | Koji Tange | 2002-01-15 |
| 5767974 | Apparatus and method for identifying photomask pattern defects | Hisayoshi Higashiguchi | 1998-06-16 |
| 5464713 | Phase shift mask and method for repairing a defect of a phase shift mask | Nobuyuki Yoshioka, Junji Miyazaki | 1995-11-07 |
| 5382484 | Method of correcting defects in the pattern of phase shift mask | — | 1995-01-17 |
| 5272116 | Method for pattern defect correction of a photomask | — | 1993-12-21 |
| 5093572 | Scanning electron microscope for observation of cross section and method of observing cross section employing the same | — | 1992-03-03 |
| 5085957 | Method of repairing a mask | — | 1992-02-04 |
| 4887283 | X-ray mask and exposure method employing the same | — | 1989-12-12 |