Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7771904 | Photomask, and method and apparatus for producing the same | Yoshikazu Nagamura, Kouki Hayashi, Hidehiro Ikeda | 2010-08-10 |
| 7585599 | Photomask, and method and apparatus for producing the same | Yoshikazu Nagamura, Kouki Hayashi, Hidehiro Ikeda | 2009-09-08 |
| 7582397 | Photomask, and method and apparatus for producing the same | Yoshikazu Nagamura, Kouki Hayashi, Hidehiro Ikeda | 2009-09-01 |
| 7264905 | Photomask, and method and apparatus for producing the same | Yoshikazu Nagamura, Kouki Hayashi, Hidehiro Ikeda | 2007-09-04 |
| 6537709 | Photo mask having film formed from halftone material, method of manufacturing photo mask, and method of manufacturing semiconductor device | Kunihiro Hosono | 2003-03-25 |