Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6327021 | Mask inspection system and method of manufacturing semiconductor device | — | 2001-12-04 |
| 5767974 | Apparatus and method for identifying photomask pattern defects | Kunihiro Hosono | 1998-06-16 |