Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7001470 | Cleaning process for photomasks | Yoshikazu Nagamura, Kunihiro Hosono, Yasutaka Kikuchi, Yuki Oomasa, Koichi Kido | 2006-02-21 |
| 6639232 | Pattern writing method employing electron beam writing device of variable-shaped vector scan system | — | 2003-10-28 |
| 6511792 | Developing process, process for forming pattern and process for preparing semiconductor device using same | Atsuko Fujino, Teruhiko Kumada, Atsushi Oshida, Hitoshi Fukuma | 2003-01-28 |
| 6338923 | Photolithography mask having monitoring marks and manufacturing method thereof | Kunihiro Hosono | 2002-01-15 |