Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10316835 | Method of determining output flow rate of gas output by flow rate controller of substrate processing apparatus | Jun Yamashima, Shinichiro Hayasaka, Toshihiro TSURUTA, Hiroshi Fujii, Junichi Akiba +1 more | 2019-06-11 |
| 7509032 | Motor drive control circuit and motor apparatus using the same | — | 2009-03-24 |
| 7330005 | Motor driving circuit | — | 2008-02-12 |