Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367595 | Plasma processing apparatus | — | 2022-06-21 |
| 10553409 | Method of cleaning plasma processing apparatus | Hiraku MURAKAMI | 2020-02-04 |
| 9728418 | Etching method and etching apparatus | Keigo Toyoda, Hiroshi Tsujimoto | 2017-08-08 |