Issued Patents All Time
Showing 26–50 of 121 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11397443 | Fluid control device and semiconductor manufacturing apparatus | Kenji Aikawa, Takahiro Matsuda, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi +1 more | 2022-07-26 |
| 11371627 | System, method, and computer program for analyzing operation of fluid control device | Yuya Suzuki, Katsunori Komehana, Masahiko Ochiishi, Akihiro Harada, Ryutaro Tanno | 2022-06-28 |
| 11365830 | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda | 2022-06-21 |
| 11346461 | Manual valve device and fluid control device | Kazunari Watanabe, Tomohiro Nakata, Toshiyuki Inada | 2022-05-31 |
| 11340636 | Abnormality diagnosis method of fluid supply line | Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda +2 more | 2022-05-24 |
| 11339881 | Valve device and fluid control device | Kazunari Watanabe, Kohei Shigyou, Yohei Sawada, Tomohiro Nakata | 2022-05-24 |
| 11320056 | Valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda | 2022-05-03 |
| 11322372 | Fluid supply device and liquid discharge method of this device | Toshihide Yoshida, Yukio Minami | 2022-05-03 |
| 11306830 | Valve device | Kenta KONDO, Tomohiro Nakata, Hidenobu Sato | 2022-04-19 |
| 11261990 | Actuator and valve device | Takeru Miura, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe, Kenta KONDO +2 more | 2022-03-01 |
| 11255458 | Valve device and fluid control device | Takahiro Matsuda, Kenji Aikawa, Toshiyuki Inada, Kazunari Watanabe, Yuta Motegi +1 more | 2022-02-22 |
| 11243549 | Valve and fluid supply line | Ryutaro Tanno, Kenji Aikawa, Akihiro Harada, Yuya Suzuki, Takahiro Matsuda +2 more | 2022-02-08 |
| 11242934 | Valve device | Kenta KONDO, Toshihide Yoshida, Masahiko TAKIMOTO, Tomohiro Nakata, Takeru Miura +1 more | 2022-02-08 |
| 11231026 | Valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda | 2022-01-25 |
| 11226257 | Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller | Akihiro Harada, Kouji Nishino, Ryousuke Dohi, Koji Kawada, Katsuyuki Sugita +4 more | 2022-01-18 |
| 11162606 | Fluid control device | Yuya Suzuki, Katsunori Komehana, Masahiko Ochiishi, Akihiro Harada, Ryutaro Tanno | 2021-11-02 |
| 11162597 | Flow path assembly and valve device | Kazunari Watanabe, Kohei Shigyou, Kenji Aikawa, Tomohiro Nakata, Takahiro Matsuda | 2021-11-02 |
| 11156305 | Fluid control system | Kenji Aikawa, Hajime Nakagawa, Takahiro Matsuda, Akihiro Harada | 2021-10-26 |
| 11118700 | Valve device and fluid control system | Kazunari Watanabe, Tomohiro Nakata | 2021-09-14 |
| 11098819 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tomohiro Nakata, Toshiyuki Inada, Takashi Funakoshi | 2021-08-24 |
| 11067195 | Actuator, valve device, and fluid control apparatus | Masahiko Nakazawa, Nobuo Nakamura, Tomohiro Nakata | 2021-07-20 |
| 11047503 | Actuator, valve device, and fluid supply system | Takeru Miura, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe, Kenta KONDO +2 more | 2021-06-29 |
| 11022242 | Pipe connection structure, pipe connection unit, and connection method of pipe | Tomohiro Nakata | 2021-06-01 |
| 11022224 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tomohiro Nakata, Toshiyuki Inada, Takashi Funakoshi, Hidenobu Sato +1 more | 2021-06-01 |
| 10998211 | Management system, method, and computer program for semiconductor fabrication apparatus | Ryutaro Tanno, Takahiro Mastuda | 2021-05-04 |