Issued Patents All Time
Showing 26–50 of 255 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844487 | Film deposition method and film deposition apparatus | Yutaka Takahashi, Masahiro Murata | 2020-11-24 |
| 10787740 | Film formation time setting method | — | 2020-09-29 |
| 10790182 | Substrate holding mechanism and substrate processing apparatus using the same | — | 2020-09-29 |
| 10748758 | Method for depositing a silicon nitride film and film deposition apparatus | Yutaka Takahashi, Kazumi Kubo | 2020-08-18 |
| 10683573 | Film forming apparatus | Shigehiro Miura, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2020-06-16 |
| 10643837 | Method for depositing a silicon nitride film and film deposition apparatus | Yutaka Takahashi, Kazumi Kubo | 2020-05-05 |
| 10636648 | Film deposition method of depositing film and film deposition apparatus | Kazumi Kubo, Yutaka Takahashi | 2020-04-28 |
| 10604837 | Film deposition apparatus | Shigehiro Miura | 2020-03-31 |
| 10593541 | Film deposition method | — | 2020-03-17 |
| 10584416 | Substrate processing apparatus | Yukio Ohizumi, Manabu Honma, Takeshi Kobayashi | 2020-03-10 |
| 10480067 | Film deposition method | Masahiro Murata, Jun Sato, Shigehiro Miura | 2019-11-19 |
| 10246775 | Film forming apparatus, method of forming film, and storage medium | — | 2019-04-02 |
| 10221480 | Substrate processing apparatus and substrate processing method | Yukio Ohizumi, Manabu Honma | 2019-03-05 |
| 10153131 | Plasma processing apparatus and plasma processing method | — | 2018-12-11 |
| 10151031 | Method for processing a substrate and substrate processing apparatus | Jun Sato, Masahiro Murata, Kentaro Oshimo, Tomoko Sugano, Shigehiro Miura | 2018-12-11 |
| 10103009 | Plasma processing device and operation method | Shigehiro Miura, Jun Sato, Takeshi Kobayashi, Masato Yonezawa | 2018-10-16 |
| 10072336 | Film forming apparatus, film forming method, and recording medium | Shigehiro Miura, Hiroyuki Kikuchi, Katsuyoshi Aikawa | 2018-09-11 |
| 10026606 | Method for depositing a silicon nitride film | Yutaka Takahashi, Masahiro Murata | 2018-07-17 |
| 9932674 | Film deposition apparatus, film deposition method, and computer-readable recording medium | Katsuyuki Hishiya, Hiroyuki Kikuchi, Shigehiro Ushikubo, Shigenori Ozaki | 2018-04-03 |
| 9865454 | Substrate processing apparatus and substrate processing method | Hiroyuki Kikuchi, Masato Yonezawa, Jun Sato, Shigehiro Miura | 2018-01-09 |
| 9817357 | Sheet processing apparatus, control method, and image forming apparatus capable of forming folding stripe on sheets | Yasuo Fukatsu | 2017-11-14 |
| 9777369 | Method of depositing a film, recording medium, and film deposition apparatus | Masahiro Murata, Kentaro Oshimo, Shigehiro Miura | 2017-10-03 |
| 9714467 | Method for processing a substrate and substrate processing apparatus | Jun Sato, Masahiro Murata, Kentaro Oshimo, Tomoko Sugano, Shigehiro Miura | 2017-07-25 |
| 9711370 | Substrate processing apparatus and method of processing a substrate | Shigehiro Miura, Jun Sato, Hiroyuki Kikuchi | 2017-07-18 |
| 9702043 | Substrate processing apparatus | Katsuyuki Hishiya | 2017-07-11 |