Issued Patents All Time
Showing 51–75 of 255 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9677174 | Film deposition method for producing a reaction product on a substrate | Takeshi Kumagai | 2017-06-13 |
| 9601318 | Plasma processing method and plasma processing apparatus | Shigehiro Miura, Jun Sato, Toshiyuki Nakatsubo, Hiroyuki Kikuchi | 2017-03-21 |
| 9580802 | Film formation method and apparatus for semiconductor process | Kohichi Orito | 2017-02-28 |
| 9583312 | Film formation device, substrate processing device, and film formation method | Jun Yamawaku, Chishio Koshimizu, Yohei Yamazawa, Mitsuhiro Tachibana, Takeshi Kobayashi +2 more | 2017-02-28 |
| 9505579 | Sheet processing apparatus having post-processing section, and image forming apparatus having the sheet processing apparatus | Naoki Ishikawa, Yasuo Fukatsu, Taishi Tomii | 2016-11-29 |
| 9502215 | Plasma processing apparatus and plasma processing method | Shigehiro Miura, Chishio Koshimizu, Jun Yamawaku, Yohei Yamazawa | 2016-11-22 |
| 9466483 | Film deposition apparatus and film deposition method | Shigehiro Miura | 2016-10-11 |
| 9453280 | Film deposition apparatus, film deposition method and storage medium | Katsuyuki Hishiya, Shigehiro Ushikubo | 2016-09-27 |
| 9416448 | Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition method | Manabu Honma, Kohichi Orito | 2016-08-16 |
| 9376751 | Plasma processing device and operation method | Shigehiro Miura, Jun Sato, Takeshi Kobayashi, Masato Yonezawa | 2016-06-28 |
| 9309076 | Sheet processing apparatus that aligns sheets and image forming system | Naoki Ishikawa, Yasuo Fukatsu, Taishi Tomii | 2016-04-12 |
| 9297072 | Film deposition apparatus | Manabu Honma | 2016-03-29 |
| 9209011 | Method of operating film deposition apparatus and film deposition apparatus | Shigehiro Miura | 2015-12-08 |
| 9153433 | Method of depositing a film and film deposition apparatus | Keiichi Tanaka, Hiroyuki Kikuchi | 2015-10-06 |
| 9111747 | Film deposition apparatus, substrate processing apparatus and film deposition method | Jun Yamawaku, Chishio Koshimizu, Mitsuhiro Tachibana, Takeshi Kobayashi, Shigehiro Miura +1 more | 2015-08-18 |
| 9103030 | Film deposition apparatus | Manabu Honma | 2015-08-11 |
| 9093490 | Film deposition apparatus | Manabu Honma, Hiroyuki Kikuchi | 2015-07-28 |
| 9062373 | Film deposition apparatus | Shigehiro Ushikubo, Katsuyuki Hishiya | 2015-06-23 |
| 9053909 | Activated gas injector, film deposition apparatus, and film deposition method | Yasushi Takeuchi, Shigehiro Ushikubo, Hiroyuki Kikuchi | 2015-06-09 |
| 9040434 | Film deposition method and film deposition apparatus | — | 2015-05-26 |
| 9039002 | Sheet post-processing apparatus with function of punching sheet | Yasuo Fukatsu, Naoki Ishikawa, Taishi Tomii | 2015-05-26 |
| 9023738 | Film deposition method | Tatsuya Tamura, Takeshi Kumagai | 2015-05-05 |
| 8992685 | Substrate processing apparatus, substrate processing method, and computer-readable storage medium | Manabu Honma, Hiroyuki Kikuchi, Yu Wamura, Jun Ogawa | 2015-03-31 |
| 8961691 | Film deposition apparatus, film deposition method, computer readable storage medium for storing a program causing the apparatus to perform the method | Kazuteru Obara, Manabu Honma | 2015-02-24 |
| 8951347 | Film deposition apparatus | Yasushi Takeuchi | 2015-02-10 |