Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622205 | Substrate processing method and substrate processing apparatus | Hiroyuki Takahashi, Takuya Abe, Masahiko Tomita, Jiro Katsuki | 2020-04-14 |
| 9466507 | Etching method, and recording medium | Shigeki Tozawa | 2016-10-11 |