Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622205 | Substrate processing method and substrate processing apparatus | Hiroyuki Takahashi, Tomoaki OGIWARA, Takuya Abe, Masahiko Tomita | 2020-04-14 |
| 7842621 | Method of measuring nitrogen concentration, method of forming silicon oxynitride film, and method of manufacturing semiconductor device. | Tetsuro Takahashi, Shuuichi Ishizuka | 2010-11-30 |
| 5728276 | Treatment apparatus | Yuichi Wada, Hiroshi Kobayashi | 1998-03-17 |
| 5624536 | Processing apparatus with collimator exchange device | Yuichi Wada, Hiroshi Kobayashi | 1997-04-29 |
| 5584973 | Processing apparatus with an invertible collimator and a processing method therefor | Yuichi Wada, Hiroshi Kobayashi | 1996-12-17 |