Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071920 | Planar heater | Daisuke Hayashi | 2011-12-06 |
| 7336892 | Reflection plate for semiconductor heat treatment and manufacturing method thereof | Hiroyuki Honma, Norihiko Saito, Hideyuki Yokoyama, Takanori Saito, Ken Nakao | 2008-02-26 |
| 5849597 | Treatment apparatus for high-precision analysis of impurities in silicic material | Fumio Tokuoka | 1998-12-15 |