Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094694 | Substrate processing apparatus and substrate processing method | Sumi Tanaka | 2024-09-17 |
| 10867819 | Vacuum processing apparatus, vacuum processing system and vacuum processing method | Takayuki Yamagishi | 2020-12-15 |
| 7799134 | Shower plate having projections and plasma CVD apparatus using same | Naoto Tsuji, Hideaki Fukuda, Hiroki Arai, Yoshinori Morisada | 2010-09-21 |
| 7690881 | Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus | Takayuki Yamagishi, Akira Watanabe, Kunihiro Kaneuchi | 2010-04-06 |