Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8664013 | Continuous processing system, continuous processing method, and program | Yuichi Takenaga | 2014-03-04 |
| 8652973 | Processing method for forming structure including amorphous carbon film | Mitsuhiro Okada | 2014-02-18 |
| 8592324 | Method for forming laminated structure including amorphous carbon film | Mitsuhiro Okada | 2013-11-26 |
| 8222162 | Batch processing method for forming structure including amorphous carbon film | Mitsuhiro Okada | 2012-07-17 |
| 7727296 | Collecting unit for semiconductor process | Naotaka Noro, Yoshiyuki Fujita, Yuji Ito | 2010-06-01 |
| 6925731 | Thin film forming apparatus cleaning method | Kazuaki Nishimura, Phillip Spaull, Kenji Tago | 2005-08-09 |
| 6635310 | Method of heat treatment | Hitoshi Kato, Yoshiyuki Fujita, Toshitake Tsuda | 2003-10-21 |
| 5315402 | Video signal recording/reproducing system for increasing recording density of a frequency modulated signal | Yasuyuki Ito, Takeshi Kawabe, Takeo Takase | 1994-05-24 |