Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10672617 | Etching method and etching apparatus | Hiroki Murakami | 2020-06-02 |
| 10475665 | Heating method, film forming method, semiconductor device manufacturing method, and film forming apparatus | Hiroki Murakami | 2019-11-12 |
| 10312078 | Nitride film forming method and storage medium | Hiroki Murakami, Daisuke Suzuki | 2019-06-04 |
| 10304676 | Method and apparatus for forming nitride film | Daisuke Suzuki, Hiroki Murakami | 2019-05-28 |
| 9985309 | High-molecular-weight electrolyte and use thereof | Masahiro Watanabe, Kenji Miyatake | 2018-05-29 |
| 9972486 | Nitride film forming method and storage medium | Hiroki Murakami, Daisuke Suzuki | 2018-05-15 |
| 9777366 | Thin film forming method | Akinobu Kakimoto, Atsushi Endo, Shigeru Nakajima, Satoshi Takagi, Kazumasa Igarashi | 2017-10-03 |
| 9390907 | Film forming method of SiCN film | Akira Shimizu, Masashi Shirai, Shinichiro Sadaike | 2016-07-12 |
| 9293323 | Method of forming silicon film | Tomoyuki Obu, Tomoyuki Nagata | 2016-03-22 |
| 9263256 | Method of forming seed layer, method of forming silicon film, and film forming apparatus | Tomoyuki Obu, Tomoyuki Nagata | 2016-02-16 |
| 9145604 | Thin film forming method and film forming apparatus | Akinobu Kakimoto, Atsushi Endo, Shigeru Nakajima, Satoshi Takagi, Kazumasa Igarashi | 2015-09-29 |
| 8808452 | Silicon film formation apparatus and method for using same | Naotaka Noro | 2014-08-19 |
| 7923357 | Method for forming poly-silicon film | Mitsuhiro Okada, Toshiharu Nishimura | 2011-04-12 |