Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846023 | Injector and substrate processing apparatus using the same, and substrate processing method | — | 2023-12-19 |
| 11361125 | Support method, design support apparatus, and a non-transitory recording medium storing a design support program | Hiroyuki Koyama | 2022-06-14 |
| 10934618 | Substrate processing apparatus, substrate loading method, and substrate processing method | — | 2021-03-02 |
| 10636627 | Substrate processing apparatus | Hirofumi Kaneko | 2020-04-28 |
| 10359757 | Control logic diagram analysis device and control logic diagram analysis method | Koichi Nakagawa, Shinichiro Tsudaka | 2019-07-23 |
| 10347024 | Control logic diagram creation support apparatus | Koichi Nakagawa, Shinichiro Tsudaka | 2019-07-09 |
| 10014199 | Wafer boat support table and heat treatment apparatus using the same | Tomoya Hasegawa | 2018-07-03 |
| D800080 | Reactor tube for semiconductor production devices | — | 2017-10-17 |
| 9756732 | Device embedded substrate and manufacturing method of device embedded substrate | Yasuaki Seki, Mitsuaki Toda | 2017-09-05 |
| 9293323 | Method of forming silicon film | Tomoyuki Obu, Takahiro Miyahara | 2016-03-22 |
| 9263256 | Method of forming seed layer, method of forming silicon film, and film forming apparatus | Tomoyuki Obu, Takahiro Miyahara | 2016-02-16 |
| 9208016 | Message sequence generation method and message sequence generation device | Tsutomu Yamaji, Yasuhide Ueno, Misayo Fujioka, Satoshi Harauchi | 2015-12-08 |