Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8586448 | Method and apparatus for forming silicon film | Satoshi Takagi, Kazuhide Hasebe | 2013-11-19 |
| 8518834 | Method and apparatus for forming oxide film on carbon film | Atsushi Endo, Kazumi Kubo | 2013-08-27 |
| 8361550 | Method for forming SrTiO3 film and storage medium | Yumiko Kawano | 2013-01-29 |
| 7816282 | Method for forming SrTiO3 film | Yumiko Kawano, Hidekimi Kadokura, Shintaro Higashi | 2010-10-19 |
| 7615251 | Processing device using shower head structure and processing method | Kentaro Oshimo, Masahiko Matsudo | 2009-11-10 |
| 6407010 | Single-substrate-heat-processing apparatus and method for semiconductor process | Hiroaki Ashizawa | 2002-06-18 |