Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8735304 | Film forming method, film forming apparatus, and storage medium | Yuichiro Morozumi, Takuya Sugawara, Koji Akiyama, Shingo Hishiya, Toshiyuki Hirota | 2014-05-27 |
| 8679913 | Method for Sr—Ti—O-based film formation | Yumiko Kawano, Susumu Arima, Akinobu Kakimoto, Toshiyuki Hirota | 2014-03-25 |
| 8508020 | Method for manufacturing semiconductor device | Toshiyuki Hirota | 2013-08-13 |
| 8357583 | Method for manufacturing semiconductor device | Toshiyuki Hirota | 2013-01-22 |
| 8288241 | Semiconductor device, method of manufacturing the same and adsorption site blocking atomic layer deposition method | Toshiyuki Hirota, Yuichiro Morozumi, Shingo Hishiya | 2012-10-16 |
| 8283227 | Method for manufacturing semiconductor memory device | Toshiyuki Hirota | 2012-10-09 |
| 7872328 | Capacitor electrode that contains oxygen and nitrogen | — | 2011-01-18 |
| 7847328 | Capacitor electrode, method for manufacturing the same, and semiconductor device | — | 2010-12-07 |
| 7786539 | Dieletric film layered product | Takuo Ohashi | 2010-08-31 |
| 7740917 | Method for forming thin film and base and having thin film formed by such method | Hiromoto Ii, Toshio Tsuji, Chikao Mamiya, Kazuhiro Fukuda, Kiyoshi Oishi | 2010-06-22 |
| 7442627 | Transparent conductive layer forming method, transparent conductive layer formed by the method, and material comprising the layer | Toshio Tsuji, Hiroto Itoh | 2008-10-28 |