Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886170 | Method of forming tungsten film | Koji Maekawa, Takashi Sameshima, Shintaro Aoyama, Mikio Suzuki, Atsushi Matsumoto +1 more | 2021-01-05 |
| 10612139 | Method of forming a tungsten film having a low resistance | Koji Maekawa, Takashi Sameshima, Shintaro Aoyama, Mikio Suzuki, Atsushi Matsumoto +1 more | 2020-04-07 |
| 9246098 | Ge—Sb—Te film forming method, Ge—Te film forming method, and Sb—Te film forming method | Yumiko Kawano | 2016-01-26 |
| 9187822 | Method for forming Ge-Sb-Te film and storage medium | Yumiko Kawano | 2015-11-17 |
| 8927060 | Method for forming Ge-Sb-Te film and storage medium | Yumiko Kawano | 2015-01-06 |
| 8679913 | Method for Sr—Ti—O-based film formation | Yumiko Kawano, Akinobu Kakimoto, Toshiyuki Hirota, Takakazu Kiyomura | 2014-03-25 |
| 8372688 | Method for forming Ge-Sb-Te film and storage medium | Yumiko Kawano | 2013-02-12 |
| 7361595 | Transition metal thin film forming method | Hideaki Yamasaki, Yumiko Kawano | 2008-04-22 |
| 6966936 | Processing system, evacuating system for processing system, low-pressure CVD system, and evacuating system and trapping device for low-pressure CVD system | Hideaki Yamasaki, Yumiko Kawano, Kenichi Kubo | 2005-11-22 |
| 6797068 | Film forming unit | Hideaki Yamasaki, Takashi Mochizuki, Yumiko Kawano | 2004-09-28 |
| 6399484 | Semiconductor device fabricating method and system for carrying out the same | Hideaki Yamasaki, Satoshi Yonezawa, Yumiko Kawano, Mitsuhiro Tachibana, Keizo Hosoda | 2002-06-04 |