Issued Patents All Time
Showing 51–75 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034673 | Film formation method and apparatus for forming silicon-containing insulating film doped with metal | Kentaro Kadonaga, Yamato Tonegawa, Pao-Hwa Chou, Tetsuya Shibata | 2011-10-11 |
| 8025931 | Film formation apparatus for semiconductor process and method for using the same | Pao-Hwa Chou | 2011-09-27 |
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2011-09-20 |
| 7993705 | Film formation apparatus and method for using the same | Nobutake Nodera, Kazuya Yamamoto | 2011-08-09 |
| 7989354 | Patterning method | Shigeru Nakajima, Pao-Hwa Chou, Mitsuaki Iwashita, Reiji Niino | 2011-08-02 |
| 7964241 | Film formation method and apparatus for semiconductor process | Pao-Hwa Chou, Kota Umezawa, Kentaro Kadonaga, Hao-Hsiang Chang | 2011-06-21 |
| 7959733 | Film formation apparatus and method for semiconductor process | Pao-Hwa Chou, Chaeho Kim | 2011-06-14 |
| 7923378 | Film formation method and apparatus for forming silicon-containing insulating film | Shigeru Nakajima, Jun Ogawa | 2011-04-12 |
| 7906168 | Film formation method and apparatus for forming silicon oxide film | Yoshihiro Ishida, Takehiko Fujita, Jun Ogawa, Shigeru Nakajima | 2011-03-15 |
| 7795158 | Oxidation method and apparatus for semiconductor process | Takehiko Fujita, Jun Ogawa, Shigeru Nakajima | 2010-09-14 |
| 7758920 | Method and apparatus for forming silicon-containing insulating film | Mitsuhiro Okada, Pao-Hwa Chou, Jun Ogawa, Chaeho Kim, Kohei Fukushima +2 more | 2010-07-20 |
| 7754622 | Patterning method utilizing SiBN and photolithography | Pao-Hwa Chou, Shigeru Nakajima, Yasushi Akasaka, Mitsuaki Iwashita, Reiji Niino | 2010-07-13 |
| 7718497 | Method for manufacturing semiconductor device | Yasushi Akasaka, Noriaki Fukiage, Yoshihiro Kato, Pao-Hwa Chou | 2010-05-18 |
| 7713354 | Film forming method, film forming system and recording medium | Mitsuhiro Okada | 2010-05-11 |
| 7655574 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2010-02-02 |
| 7651733 | Method for forming a vapor phase growth film | Hiroyuki Yamamoto, Takahito Umehara, Masato Kawakami | 2010-01-26 |
| 7651730 | Method and apparatus for forming silicon oxide film | — | 2010-01-26 |
| 7648895 | Vertical CVD apparatus for forming silicon-germanium film | Masaki Kurokawa, Katsuhiko Komori, Norifumi Kimura, Takehiko Fujita, Akitake Tamura +1 more | 2010-01-19 |
| 7622402 | Method for forming underlying insulation film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2009-11-24 |
| 7611995 | Method for removing silicon oxide film and processing apparatus | Mitsuhiro Okada, Takashi Chiba, Jun Ogawa | 2009-11-03 |
| 7604010 | Film formation apparatus and method of using the same | Nobutake Nodera, Atsushi Endo, Makoto Umeki, Katsumi Nishimura, Masakazu Minami +1 more | 2009-10-20 |
| 7546840 | Method for cleaning reaction container and film deposition system | Daisuke Nozu, Dong-Kyun Choi | 2009-06-16 |
| 7520937 | Thin film forming apparatus and method of cleaning the same | Mitsuhiro Okada, Hiromichi Kotsugai | 2009-04-21 |
| 7507676 | Film formation method and apparatus for semiconductor process | Pao-Hwa Chou | 2009-03-24 |
| 7479619 | Thermal processing unit | Takanori Saito, Toshiyuki Makiya, Hisaei Osanai, Tsuyoshi Takizawa, Tomohisa Shimazu +3 more | 2009-01-20 |