Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429420 | Gas analysis apparatus and gas analysis method | Motonobu TAKAHASHI, Sotaro Kishida, Akira Kuwahara, Takeshi Akamatsu, Yuhei SAKAGUCHI | 2025-09-30 |
| 12332175 | Optical measurement cell, optical analyzer, window forming member, and method of manufacturing optical measurement cell | Yoshiaki Nakata, Yuhei SAKAGUCHI, Toru Shimizu, Takeshi Akamatsu | 2025-06-17 |
| 11796460 | Absorbance analysis apparatus for DCR gas, absorbance analysis method for DCR gas, and absorbance analysis program recording medium on which program for DCR gas is recorded | Yuichi FURUYA, Masayuki Tanaka, Yuhei SAKAGUCHI, Toru Shimizu | 2023-10-24 |
| 11631596 | Concentration control apparatus, source consumption quantity estimation method, and program recording medium on which a program for a concentration control apparatus is recorded | Toru Shimizu | 2023-04-18 |
| 11519070 | Vaporization device, film formation device, program for a concentration control mechanism, and concentration control method | Toru Shimizu | 2022-12-06 |
| 11493443 | Light absorbance analysis apparatus and program record medium for recording programs of light absorbance analysis apparatus | Toru Shimizu, Yuhei SAKAGUCHI | 2022-11-08 |
| 11365480 | Concentration control apparatus, zero point adjustment method, and program recording medium recorded with concentration control apparatus program | Toru Shimizu | 2022-06-21 |
| 11226235 | Absorption spectroscopic system, program recording medium for an absorption spectroscopic system and absorbance measurement method | Toru Shimizu, Yuhei SAKAGUCHI | 2022-01-18 |
| 10927462 | Gas control system and film formation apparatus provided with gas control system | Hiroshi Nishizato, Yuhei SAKAGUCHI | 2021-02-23 |
| 10718050 | Concentration control apparatus and material gas supply system | Toru Shimizu | 2020-07-21 |
| 10655220 | Gas control system, deposition apparatus including gas control system, and program and gas control method used for gas control system | Yuhei SAKAGUCHI, Toru Shimizu, Daisuke Hayashi | 2020-05-19 |
| 10138555 | Gas control system and program for gas control system | Hiroshi Nishizato, Kotaro Takijiri, Atsuko Teraoka | 2018-11-27 |
| 9970865 | Decomposition detecting unit, concentration measuring unit, and concentration control apparatus | — | 2018-05-15 |
| 9823181 | Cp2Mg concentration measuring device | Daisuke Hayashi, Yuhei SAKAGUCHI, Atsuko Teraoka | 2017-11-21 |
| 8800589 | Material gas concentration control system | Masaki Inoue | 2014-08-12 |
| 8459290 | Material gas concentration control system | Daisuke Hayashi, Yuhei SAKAGUCHI, Katsumi Nishimura, Masaki Inoue, Kotaro Takijiri | 2013-06-11 |
| 8459291 | Source gas concentration control system | Masaki Inoue | 2013-06-11 |
| 7604010 | Film formation apparatus and method of using the same | Kazuhide Hasebe, Nobutake Nodera, Atsushi Endo, Makoto Umeki, Katsumi Nishimura +1 more | 2009-10-20 |