Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11906984 | Concentration control system, concentration control method and program for a concentration control system | Ojiro Takamune | 2024-02-20 |
| 11789435 | Flow control device, diagnostic method, and program for flow control device | Kentaro Nagai, Tsai Wei Tseng | 2023-10-17 |
| 11644852 | Flow rate ratio control system, film forming system, abnormality diagnosis method, and abnormality diagnosis program medium | Yusuke Kanamaru, Kazuya Shakudo | 2023-05-09 |
| 10921828 | Fluid control apparatus and flow rate ratio control apparatus | Yoshitake Ando, Yuki Tanaka, Yusuke Kanamaru, Emiko Nakagawa | 2021-02-16 |
| 10705545 | Fluid control device and flow rate ratio control device | Yusuke Kanamaru, Emiko Nakagawa, Yuki Tanaka | 2020-07-07 |
| 10302476 | Flow rate control device | Atsushi Ieki, Yuki Tanaka | 2019-05-28 |
| 10234884 | Power supply apparatus of fluid control and measurement system | Hiroshi Takakura, Kenichi Oe | 2019-03-19 |
| 10216162 | Fluid control and measurement system with a relay | Kenichi Oe, Yukimasa Furukawa | 2019-02-26 |
| 10138555 | Gas control system and program for gas control system | Hiroshi Nishizato, Masakazu Minami, Atsuko Teraoka | 2018-11-27 |
| 10082806 | Flow-rate control device and flow-rate control program | Keita Shimizu | 2018-09-25 |
| 9823667 | Flow rate control apparatus, storage medium storing program for flow rate control apparatus and flow rate control method | Yuki Tanaka, Atsushi Ieki | 2017-11-21 |
| 9459629 | Flow rate controller and recording medium recorded with program for flow rate controller | — | 2016-10-04 |
| 9075414 | Pressure control device, flow rate control device and recording medium having programs used for pressure control device, recording medium having programs used for flow rate control device | — | 2015-07-07 |
| 8459290 | Material gas concentration control system | Masakazu Minami, Daisuke Hayashi, Yuhei SAKAGUCHI, Katsumi Nishimura, Masaki Inoue | 2013-06-11 |
| 8054081 | Residual gas analyzer | Toru Ikeda, Junji Aoki | 2011-11-08 |