Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11982371 | Fluid control valve and fluid control apparatus | Yuya KAWAI | 2024-05-14 |
| 11680646 | Fluid control valve, fluid control device, valve element, and method of manufacturing valve element | — | 2023-06-20 |
| 11644852 | Flow rate ratio control system, film forming system, abnormality diagnosis method, and abnormality diagnosis program medium | Yusuke Kanamaru, Kotaro Takijiri | 2023-05-09 |
| 11537150 | Fluid control apparatus | — | 2022-12-27 |
| 11531359 | Fluid control apparatus, fluid control method, and program recording medium in which program for fluid control apparatus is recorded | — | 2022-12-20 |
| 11262222 | Fluid device and program for fluid device | Kentaro Nagai, Kazuhiro Matsuura | 2022-03-01 |
| 10890475 | Diagnostic system, diagnostic method, diagnostic program, and flow rate controller | Kentaro Nagai, Kazuhiro Matsuura | 2021-01-12 |
| 10480670 | Valve element and fluid control valve | Shigeyuki Hayashi | 2019-11-19 |