Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877492 | Flow path forming structure, flow rate measuring device and flow rate control device | Hiroyuki Okano | 2020-12-29 |
| 10480669 | Valve device and valve control device | — | 2019-11-19 |
| 10323771 | Fluid control valve and recording medium with control program thereof recorded therein | Daichi Kunita | 2019-06-18 |
| 10302476 | Flow rate control device | Kotaro Takijiri, Yuki Tanaka | 2019-05-28 |
| 10184185 | Gas flow monitoring method and gas flow monitoring apparatus | Akiko Nakada, Yasunori Nishimura, Minoru Ito, Masami Nishikawa, Shigeyuki Hayashi | 2019-01-22 |
| 9823667 | Flow rate control apparatus, storage medium storing program for flow rate control apparatus and flow rate control method | Kotaro Takijiri, Yuki Tanaka | 2017-11-21 |
| 9448089 | Optical encoder | Yasukazu Hayashi | 2016-09-20 |
| 6094307 | Optical grating and encoder | — | 2000-07-25 |
| 5981942 | Optical encoder for detecting relative displacement based on signals having predetermined phase differences | — | 1999-11-09 |
| 5801378 | Optical encoder diffraction gratings for eliminating diffracted light components | Kazuhiro Hane, Keiji Matsui | 1998-09-01 |
| 5750984 | Optical encoder used for position detection based upon a plurality of signals | — | 1998-05-12 |
| 5748373 | Scale and encoder including differently spaced pattern lines | Kazuhiro Hane | 1998-05-05 |
| 5737069 | Position detecting apparatus of optical interferometry | Masayuki Nashiki | 1998-04-07 |
| 5260568 | Absolute position detector with diffraction grating windows and spot position detection | — | 1993-11-09 |
| 5260769 | Position detector | Keiji Matsui, Masayuki Nashiki | 1993-11-09 |
| 5182613 | Position detecting apparatus generating periodic detection signals having equal third and fifth harmonic components | Yasukazu Hayashi, Keiji Matsui | 1993-01-26 |
| 5177356 | Optical encoder | Kenji Matsui | 1993-01-05 |
| 5170221 | Parallel light ray measuring apparatus | Keiji Matsui | 1992-12-08 |
| 5068530 | Optical encoder | Keiji Matsui | 1991-11-26 |