Issued Patents All Time
Showing 26–50 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8940097 | Vertical heat treatment apparatus | — | 2015-01-27 |
| 8815714 | Method of forming a germanium thin film | Akinobu Kakimoto, Shigeru Nakajima | 2014-08-26 |
| 8753984 | Method and apparatus for forming silicon nitride film | Hiroki Murakami, Yosuke Watanabe | 2014-06-17 |
| 8728957 | Thin film formation method and film formation apparatus | Akinobu Kakimoto | 2014-05-20 |
| 8722510 | Trench-filling method and film-forming system | Masahisa Watanabe | 2014-05-13 |
| 8697578 | Film formation apparatus and method for using same | Nobutake Nodera, Jun Sato, Kazuya Yamamoto | 2014-04-15 |
| 8591989 | SiCN film formation method and apparatus | Pao-Hwa Chou | 2013-11-26 |
| 8586448 | Method and apparatus for forming silicon film | Akinobu Kakimoto, Satoshi Takagi | 2013-11-19 |
| 8563096 | Vertical film formation apparatus and method for using same | Masanobu Matsunaga, Pao-Hwa Chou, Masato Yonezawa, Masayuki Hasegawa | 2013-10-22 |
| 8431494 | Film formation method and film formation apparatus | Hiroki Murakami, Kazuya Yamamoto, Toshihiko Takahashi, Daisuke Suzuki | 2013-04-30 |
| 8426117 | Mask pattern forming method, fine pattern forming method, and film deposition apparatus | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2013-04-23 |
| 8383522 | Micro pattern forming method | Shigeru Nakajima, Pao-Hwa Chou, Mitsuaki Iwashita, Reiji Niino | 2013-02-26 |
| 8357619 | Film formation method for forming silicon-containing insulating film | Shigeru Nakajima, Jun Ogawa | 2013-01-22 |
| 8349401 | Film formation apparatus and method for using same | Jun Sato, Kiyotaka Kikuchi, Hiroki Murakami, Shigeru Nakajima | 2013-01-08 |
| 8343594 | Film formation method and apparatus for semiconductor process | Mitsuhiro Okada, Chaeho Kim, Byounghoon Lee, Pao-Hwa Chou | 2013-01-01 |
| 8298628 | Low temperature deposition of silicon-containing films | Liu Yang, Xinjian Lei, Bing Han, Manchao Xiao, Eugene Joseph Karwacki, Jr. +3 more | 2012-10-30 |
| 8257789 | Film formation method in vertical batch CVD apparatus | Masanobu Matsunaga, Nobutake Nodera | 2012-09-04 |
| 8216648 | Film formation method and apparatus | Masanobu Matsunaga, Keisuke Suzuki, Jaehyuk Jang, Pao-Hwa Chou, Masato Yonezawa +1 more | 2012-07-10 |
| 8178448 | Film formation method and apparatus for semiconductor process | Nobutake Nodera, Masanobu Matsunaga, Koto Umezawa, Pao-Hwa Chou | 2012-05-15 |
| 8168270 | Film formation method and apparatus for semiconductor process | Yoshihiro Ishida, Takehiko Fujita, Jun Ogawa, Shigeru Nakajima | 2012-05-01 |
| 8168375 | Patterning method | Shigeru Nakajima, Pao-Hwa Chou, Mitsuaki Iwashita, Reiji Niino | 2012-05-01 |
| 8124181 | Oxidation method providing parallel gas flow over substrates in a semiconductor process | Takehiko Fujita, Shigeru Nakajima, Jun Ogawa | 2012-02-28 |
| 8119544 | Film formation method and apparatus for semiconductor process | Nobutake Nodera, Eun-Jo Lee | 2012-02-21 |
| 8080290 | Film formation method and apparatus for semiconductor process | Nobutake Nodera, Masanobu Matsunaga, Jun Satoh, Pao-Hwa Chou | 2011-12-20 |
| 8080477 | Film formation apparatus and method for using same | Nobutake Nodera, Jun Sato, Masanobu Matsunaga | 2011-12-20 |