Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9505019 | Plating apparatus, plating method and storage medium | Yuichiro Inatomi, Takashi Tanaka | 2016-11-29 |
| 9487865 | Plating apparatus, plating method and storage medium | Yuichiro Inatomi, Takashi Tanaka | 2016-11-08 |
| 9421569 | Plating apparatus, plating method and storage medium | Takashi Tanaka, Yusuke Saito, Takayuki Toshima | 2016-08-23 |
| 9255331 | Apparatus for plating process | Takashi Tanaka, Yusuke Saito | 2016-02-09 |
| 9236280 | Substrate processing apparatus, substrate processing method, and storage medium | Takayuki Toshima, Yuji Kamikawa, Mikio Nakashima | 2016-01-12 |
| 8999432 | Cap metal forming method | Takashi Tanaka, Yusuke Saito | 2015-04-07 |
| 8937014 | Liquid treatment apparatus and liquid treatment method | Takashi Tanaka, Yusuke Saito | 2015-01-20 |
| 8770138 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | Kenichi Hara, Takashi Tanaka, Takayuki Toshima, Takehiko Orii | 2014-07-08 |
| 8771429 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2014-07-08 |
| 8691497 | Developing treatment method | Yuichiro Inatomi | 2014-04-08 |
| 8465596 | Supercritical processing apparatus and supercritical processing method | Takayuki Toshima, Kazuyuki Mitsuoka, Hidekazu Okamoto, Hideo Namatsu | 2013-06-18 |
| 8383522 | Micro pattern forming method | Shigeru Nakajima, Kazuhide Hasebe, Pao-Hwa Chou, Reiji Niino | 2013-02-26 |
| 8372212 | Supercritical drying method and apparatus for semiconductor substrates | Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Hidekazu Hayashi, Yukiko Kitajima +5 more | 2013-02-12 |
| 8206785 | Cap metal forming method | Takayuki Toshima, Takashi Tanaka, Yusuke Saito | 2012-06-26 |
| 8168375 | Patterning method | Shigeru Nakajima, Kazuhide Hasebe, Pao-Hwa Chou, Reiji Niino | 2012-05-01 |
| 8168377 | Pattern forming method and method of manufacturing semiconductor device by using the same | Kazuyuki Mitsuoka, Makoto Muramatsu | 2012-05-01 |
| 8062955 | Substrate processing method and substrate processing apparatus | Takashi Tanaka, Kenichi Hara | 2011-11-22 |
| 8003509 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | Kenichi Hara, Takashi Tanaka, Takayuki Toshima, Takehiko Orii | 2011-08-23 |
| 7989354 | Patterning method | Shigeru Nakajima, Kazuhide Hasebe, Pao-Hwa Chou, Reiji Niino | 2011-08-02 |
| 7781342 | Substrate treatment method for etching a base film using a resist pattern | Satoru Shimura, Keiji Tanouchi | 2010-08-24 |
| 7754622 | Patterning method utilizing SiBN and photolithography | Pao-Hwa Chou, Kazuhide Hasebe, Shigeru Nakajima, Yasushi Akasaka, Reiji Niino | 2010-07-13 |
| 7521098 | Method of processing an organic-film | Kazuyuki Mitsuoka, Tadashi Onishi, Minoru Honda, Ryuichi Asako | 2009-04-21 |
| 7195936 | Thin film processing method and system | Tadashi Onishi, Manabu Hama, Minoru Honda, Kazuyuki Mitsuoka | 2007-03-27 |
| 6800546 | Film forming method by radiating a plasma on a surface of a low dielectric constant film | Nobuo Konishi, Hiroki Ohno, Shigeru Kawamura, Masahito Sugiura | 2004-10-05 |
| 6683006 | Film forming method and film forming apparatus | Nobuo Konishi | 2004-01-27 |