Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354484 | Liquid processing apparatus and liquid processing method | Masahiro Mukoyama, Hiromitsu Nanba | 2008-04-08 |
| 7332055 | Substrate processing apparatus | Tatsuya Nishida, Osamu Kuroda | 2008-02-19 |
| 7329616 | Substrate processing apparatus and substrate processing method | Masaru Amai | 2008-02-12 |
| 7300598 | Substrate processing method and apparatus | Nobuo Konishi, Takayuki Toshima | 2007-11-27 |
| 7275553 | Liquid processing apparatus and liquid processing method | Masahiro Mukoyama, Hiromitsu Nanba | 2007-10-02 |
| 7171973 | Substrate processing apparatus | Tatsuya Nishida, Osamu Kuroda | 2007-02-06 |
| 6979655 | Substrate processing method and substrate processing apparatus | Takayuki Niuya, Hiroyuki Mori, Hiroshi Yano, Mitsunori Nakamori | 2005-12-27 |
| 6863741 | Cleaning processing method and cleaning processing apparatus | Mitsunori Nakamori | 2005-03-08 |
| 6817790 | Substrate processing method and substrate processing apparatus | Takayuki Toshima | 2004-11-16 |
| 6634806 | Substrate processing method and substrate processing apparatus | Takayuki Toshima | 2003-10-21 |
| 6578592 | Processing apparatus with horizontally movable enclosing element | Yuji Kamikawa, Kyouji Kohama | 2003-06-17 |
| 6513537 | Substrate processing method and substrate processing apparatus | Hiroki Ohno, Takashi Yabuta | 2003-02-04 |