Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847353 | Pulse monitor device and plasma processing apparatus | Kazushi Kaneko | 2020-11-24 |
| 10748746 | Microwave output device and plasma processing apparatus | Kazushi Kaneko | 2020-08-18 |
| 9455153 | Plasma processing method | Genki Koguchi, Akio Morisaki | 2016-09-27 |