Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418822 | Plasma processing apparatus, plasma processing method and high frequency generator | Naoki Matsumoto, Koji Koyama, Kazunori Funazaki, Hideo Kato, Kiyotaka Ishibashi | 2016-08-16 |
| 9373483 | Plasma processing apparatus and high frequency generator | Kazunori Funazaki, Hideo Kato | 2016-06-21 |
| 9305751 | Microwave plasma processing apparatus and microwave supplying method | Toshihiko Iwao, Satoru Kawakami | 2016-04-05 |
| 9241397 | Microwave plasma processing apparatus and microwave supply method | Yunosuke Hashimoto, Yohei Ishida | 2016-01-19 |
| 9159536 | Plasma processing apparatus, abnormal oscillation determination method and high-frequency generator | Kazunori Funazaki, Yunosuke Hashimoto | 2015-10-13 |