Issued Patents All Time
Showing 26–50 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705310 | Plasma probe device, plasma processing apparatus, and control method | Mikio Sato, Eiki KAMATA | 2023-07-18 |
| 11600475 | Plasma processing apparatus and control method | Mikio Sato, Eiki KAMATA | 2023-03-07 |
| 11538667 | Stage, plasma processing apparatus, and plasma processing method | Satoru Kawakami, Sumi Tanaka | 2022-12-27 |
| 11508556 | Plasma processing apparatus | Tomohito Komatsu, Jun NAKAGOMI, Kei Nagayosi | 2022-11-22 |
| 11476088 | Array antenna and plasma processing apparatus | Eiki KAMATA, Mikio Sato, Nobuhiko Yamamoto | 2022-10-18 |
| 11410835 | Plasma density monitor, plasma processing apparatus, and plasma processing method | Eiki KAMATA, Mikio Sato | 2022-08-09 |
| 11355326 | Plasma processing apparatus and control method | Mikio Sato, Eiki KAMATA | 2022-06-07 |
| 11244192 | Image judging system, image judging apparatus, and image judging method | — | 2022-02-08 |
| 11164730 | Plasma probe device and plasma processing apparatus | Tomohito Komatsu, Yuki Osada, Hiroyuki Miyashita, Susumu Saito, Kazuhiro Furuki +2 more | 2021-11-02 |
| 11152269 | Plasma processing apparatus and control method | Yuki Osada | 2021-10-19 |
| 10991549 | Antenna and plasma deposition apparatus | Toshihiko Iwao | 2021-04-27 |
| 10971413 | Plasma processing apparatus and control method | Yuki Osada | 2021-04-06 |
| 10804078 | Plasma processing apparatus and gas introduction mechanism | Yutaka Fujino, Tomohito Komatsu, Jun NAKAGOMI, Takeo Wakutsu | 2020-10-13 |
| 10777389 | Plasma processing apparatus and plasma processing method | — | 2020-09-15 |
| 10727030 | Microwave plasma source and plasma processing apparatus | Tomohito Komatsu | 2020-07-28 |
| 10557200 | Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate | Shigeru Kasai, Emiko HARA, Yutaka Fujino, Yuki Osada, Jun NAKAGOMI +1 more | 2020-02-11 |
| 10443130 | Plasma processing apparatus with shower plate having protrusion for suppressing film formation in gas holes of shower plate | — | 2019-10-15 |
| 10319567 | Microwave plasma source and plasma processing apparatus | Akira Tanihara, Shigeru Kasai, Nobuhiko Yamamoto | 2019-06-11 |
| 10211032 | Microwave plasma source and plasma processing apparatus | Tomohito Komatsu, Yutaka Fujino | 2019-02-19 |
| 9704693 | Power combiner and microwave introduction mechanism | Hiroyuki Miyashita | 2017-07-11 |
| 9702913 | Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method | Yutaka Fujino, Hikaru Adachi, Hiroyuki Miyashita, Yuki Osada, Nobuhiko Yamamoto | 2017-07-11 |
| 9663856 | Plasma processing apparatus and shower plate | Shigeru Kasai, Yutaka Fujino | 2017-05-30 |
| 9552966 | Antenna for plasma generation, plasma processing apparatus and plasma processing method | Tomohito Komatsu, Shigeru Kasai | 2017-01-24 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Tomohito Komatsu, Shigeru Kasai, Hiroyuki Miyashita, Yuki Osada, Akira Tanihara +1 more | 2017-01-17 |
| 9543123 | Plasma processing apparatus and plasma generation antenna | Tomohito Komatsu, Shigeru Kasai | 2017-01-10 |