Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002662 | Electrostatic attraction device and neutralization method | Takahiro KAWAWA | 2024-06-04 |
| 11862439 | Substrate processing apparatus and charge neutralization method for mounting table | Takahiro KAWAWA, Kouichi Nakajima, Masamichi Hara | 2024-01-02 |
| 11189461 | Substrate processing method and apparatus | Yoshinori Yamamoto, Naoki Takahashi | 2021-11-30 |