Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862488 | Substrate stage | Masamichi Hara | 2024-01-02 |
| 11282733 | Stage mechanism, processing apparatus, and method of operating the stage mechanism | Yuuki Motomura, Hiroshi Sone, Naoyuki Suzuki | 2022-03-22 |