Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8920107 | Substrate support apparatus and vacuum processing apparatus | Tadashi Ikeda, Hiroshi Sone | 2014-12-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8920107 | Substrate support apparatus and vacuum processing apparatus | Tadashi Ikeda, Hiroshi Sone | 2014-12-30 |