Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062559 | Substrate processing system, substrate processing method, and control program | Toshiharu Hirata, Minoru Nagasawa, Kunio Takano | 2024-08-13 |
| 11908712 | Semiconductor manufacturing apparatus, substrate transfer method, and program | Toshiharu Hirata, Kunio Takano, Minoru Nagasawa | 2024-02-20 |
| 11127615 | Substrate processing system and substrate transfer method | Kunio Takano, Toshiharu Hirata | 2021-09-21 |
| 11086286 | Substrate processing system, substrate processing method, and control program | Toshiharu Hirata, Yosuke Katada, Kunio Takano, Kouichi Nakajima | 2021-08-10 |