Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368027 | Substrate processing method and substrate processing apparatus | Takatoshi Orui, Ryutaro SUDA, Yoshihide Kihara, Maju TOMURA | 2025-07-22 |
| 12074009 | Apparatus for processing a substrate | Yuki Iijima, Toru Hisamatsu | 2024-08-27 |
| 11996296 | Substrate processing method and substrate processing system | Ryutaro SUDA, Maju TOMURA, Kenji Ouchi, Hiroki Murakami, Munehito KAGAYA +1 more | 2024-05-28 |
| 11545355 | Substrate processing method and substrate processing apparatus | Toru Hisamatsu, Masanobu Honda | 2023-01-03 |
| 11201062 | Method and apparatus for processing a substrate | Yuki Iijima, Toru Hisamatsu | 2021-12-14 |
| 11171012 | Method and apparatus for formation of protective sidewall layer for bow reduction | Ryutaro SUDA, Maju TOMURA | 2021-11-09 |