Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062522 | Plasma etching method and plasma etching apparatus | Fumiya Kobayashi, Maju TOMURA | 2024-08-13 |
| 11355352 | Plasma etching method and plasma etching apparatus | Fumiya Kobayashi, Maju TOMURA | 2022-06-07 |
| 10707091 | Plasma etching method and plasma etching apparatus | Fumiya Kobayashi, Maju TOMURA | 2020-07-07 |
| 10163653 | Plasma etching method and plasma etching apparatus | Fumiya Kobayashi, Maju TOMURA | 2018-12-25 |
| 9396962 | Etching method | Takayuki Katsunuma, Masanobu Honda | 2016-07-19 |