Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380555 | Etching method and etching apparatus | Sho Kumakura, Hironari Sasagawa, Yoshihide Kihara | 2022-07-05 |
| 11361976 | Substrate processing method and plasma processing apparatus | Ryutaro SUDA | 2022-06-14 |
| 11355352 | Plasma etching method and plasma etching apparatus | Keiji Kitagaito, Fumiya Kobayashi | 2022-06-07 |
| 11355350 | Etching method, substrate processing apparatus, and substrate processing system | Shinya Ishikawa, Kenta ONO, Masanobu Honda | 2022-06-07 |
| 11342194 | Substrate processing method and substrate processing apparatus | Ryutaro SUDA | 2022-05-24 |
| 11270889 | Etching method and etching apparatus | Yoshihide Kihara, Masanobu Honda | 2022-03-08 |
| 11171012 | Method and apparatus for formation of protective sidewall layer for bow reduction | Ryutaro SUDA, Kae KUMAGAI | 2021-11-09 |
| 11139169 | Etching method and etching apparatus | Sho Kumakura, Satoshi OHUCHIDA | 2021-10-05 |
| 11127600 | Etching method | Koki Tanaka | 2021-09-21 |
| 11114304 | Substrate processing method | Takayuki Katsunuma, Toru Hisamatsu, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda +1 more | 2021-09-07 |
| 11101138 | Etching method | Yoshihide Kihara, Masanobu Honda | 2021-08-24 |
| 10916420 | Processing method and plasma processing apparatus | Masahiro Tabata, Toru Hisamatsu, Sho Kumakura, Hironari Sasagawa | 2021-02-09 |
| 10707091 | Plasma etching method and plasma etching apparatus | Keiji Kitagaito, Fumiya Kobayashi | 2020-07-07 |
| 10692729 | Etching process method | Jin Kudo, Wataru TAKAYAMA | 2020-06-23 |
| 10600654 | Etching process method | Jin Kudo, Yoshinobu Ohya | 2020-03-24 |
| 10586710 | Etching method | Yoshihide Kihara, Masanobu Honda | 2020-03-10 |
| 10163653 | Plasma etching method and plasma etching apparatus | Keiji Kitagaito, Fumiya Kobayashi | 2018-12-25 |
| 10090191 | Selective plasma etching method of a first region containing a silicon atom and an oxygen atom | Takayuki Katsunuma, Masanobu Honda | 2018-10-02 |
| 9972503 | Etching method | Masanobu Honda | 2018-05-15 |
| 9922806 | Etching method and plasma processing apparatus | Ryohei TAKEDA, Ryuichi TAKASHIMA, Yoshinobu Ooya | 2018-03-20 |
| 9837285 | Etching method | Masanobu Honda | 2017-12-05 |
| 9390935 | Etching method | Hikaru Watanabe, Fumiya Kobayashi, Kazuhiro Kubota, Masanobu Honda | 2016-07-12 |
| 9299579 | Etching method and plasma processing apparatus | Hikaru Watanabe, Takahiko Kato, Masanobu Honda | 2016-03-29 |