Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412750 | Plasma processing method and plasma processing apparatus | Shinya Ishikawa, Masanobu Honda | 2025-09-09 |
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Tomohiko NIIZEKI, Takayuki Katsunuma, Hironari Sasagawa, Yuta NAKANE +4 more | 2024-10-08 |
| 11865850 | Liquid ejecting apparatus and liquid ejecting head | Shingo Tomimatsu, Masahiko Sato, Hiroki Kobayashi, Osamu Yagi | 2024-01-09 |
| 11651971 | Etching method, substrate processing apparatus, and substrate processing system | Shinya Ishikawa, Masanobu Honda | 2023-05-16 |
| 11355350 | Etching method, substrate processing apparatus, and substrate processing system | Shinya Ishikawa, Maju TOMURA, Masanobu Honda | 2022-06-07 |
| 11328933 | Etching method, substrate processing apparatus, and substrate processing system | Shinya Ishikawa, Masanobu Honda | 2022-05-10 |
| 8697546 | Method of manufacturing semiconductor device | — | 2014-04-15 |
| 8582277 | Laminated type ceramic electronic parts | Hirobumi Tanaka, Makoto Endo, Satoko Ueda, Daisuke Ueda, Shogo Murosawa +3 more | 2013-11-12 |