Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400835 | Plasma processing method and plasma processing system | Satoshi OHUCHIDA, Noboru Saito, Yoshihide Kihara, Maju TOMURA | 2025-08-26 |
| 11798793 | Substrate processing method, component processing method, and substrate processing apparatus | Satoshi OHUCHIDA, Yusuke WAKO, Maju TOMURA, Yoshihide Kihara | 2023-10-24 |