Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10600660 | Method of selectively etching first region made of silicon nitride against second region made of silicon oxide | Masahiro Tabata | 2020-03-24 |
| 10483118 | Etching method | Masahiro Tabata | 2019-11-19 |
| 10319613 | Method of selectively etching first region made of silicon nitride against second region made of silicon oxide | Masahiro Tabata | 2019-06-11 |
| 10269578 | Etching method | Masahiro Tabata | 2019-04-23 |