Issued Patents All Time
Showing 26–50 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456180 | Etching method | Takahiro Yokoyama, Maju TOMURA, Ryutaro SUDA, Takatoshi Orui | 2022-09-27 |
| 11450537 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Hironari Sasagawa, Maju TOMURA | 2022-09-20 |
| 11417535 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Maju TOMURA, Satoshi OHUCHIDA | 2022-08-16 |
| 11380551 | Method of processing target object | Masahiro Tabata | 2022-07-05 |
| 11380555 | Etching method and etching apparatus | Maju TOMURA, Sho Kumakura, Hironari Sasagawa | 2022-07-05 |
| 11367610 | Film forming and process container cleaning method | Takahiro Yokoyama | 2022-06-21 |
| 11270889 | Etching method and etching apparatus | Maju TOMURA, Masanobu Honda | 2022-03-08 |
| 11264236 | Substrate processing method | Toru Hisamatsu, Takayuki Katsunuma, Shinya Ishikawa, Masanobu Honda | 2022-03-01 |
| 11244828 | Method for processing workpiece | Toru Hisamatsu, Tomoyuki Oishi | 2022-02-08 |
| 11139175 | Method of processing target object | Toru Hisamatsu, Masahiro Tabata | 2021-10-05 |
| 11133192 | Workpiece processing method | Masahiro Tabata, Toru Hisamatsu | 2021-09-28 |
| 11114304 | Substrate processing method | Takayuki Katsunuma, Toru Hisamatsu, Shinya Ishikawa, Masanobu Honda, Maju TOMURA +1 more | 2021-09-07 |
| 11101138 | Etching method | Maju TOMURA, Masanobu Honda | 2021-08-24 |
| 11094551 | Plasma processing method and plasma processing apparatus | Toru Hisamatsu, Kensuke Taniguchi, Yoshinari Hatazaki | 2021-08-17 |
| 11081360 | Method for processing workpiece | Masahiro Tabata, Toru Hisamatsu, Masanobu Honda | 2021-08-03 |
| 11056370 | Method for processing workpiece | Shuhei Ogawa, Keigo Toyoda | 2021-07-06 |
| 10886136 | Method for processing substrates | Toru Hisamatsu, Masanobu Honda | 2021-01-05 |
| 10777422 | Method for processing target object | Toru Hisamatsu, Masanobu Honda | 2020-09-15 |
| 10763123 | Method for processing workpiece | Toru Hisamatsu | 2020-09-01 |
| 10714340 | Method for processing workpiece | Toru Hisamatsu, Tomoyuki Oishi | 2020-07-14 |
| 10685848 | Workpiece processing method | Yu Nagatomo | 2020-06-16 |
| 10586710 | Etching method | Maju TOMURA, Masanobu Honda | 2020-03-10 |
| 10566209 | Etching method and workpiece processing method | Yu Nagatomo | 2020-02-18 |
| 10559472 | Workpiece processing method | Masahiro Tabata, Toru Hisamatsu | 2020-02-11 |
| 10553446 | Method of processing target object | Toru Hisamatsu, Masahiro Tabata | 2020-02-04 |