Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557485 | Plasma processing method and plasma processing apparatus | Yoshihide Kihara, Toru Hisamatsu, Kensuke Taniguchi | 2023-01-17 |
| 11454744 | Method for producing microlens and plasma processing apparatus | Takashi Shinyama | 2022-09-27 |
| 11094551 | Plasma processing method and plasma processing apparatus | Yoshihide Kihara, Toru Hisamatsu, Kensuke Taniguchi | 2021-08-17 |
| 10658189 | Etching method | Wakako Ishida, Kensuke Taniguchi | 2020-05-19 |