Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341001 | Cleaning method and plasma processing apparatus | Yasunori Hatamura, Eundo Bae, Kazuya Kato, Inho Jang, Eisuke Numazawa | 2025-06-24 |
| 11430664 | Etching method and plasma processing apparatus | Masaaki Kikuchi, Wataru Togashi, Yasunori Hatamura | 2022-08-30 |
| 11328934 | Etching method and substrate processing apparatus | Sho OIKAWA | 2022-05-10 |
| 10658189 | Etching method | Yoshinari Hatazaki, Kensuke Taniguchi | 2020-05-19 |