Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721595 | Processing method and plasma processing apparatus | Seiji Yokoyama, Taichi Okano, Shunichi Kawasaki | 2023-08-08 |
| 11610766 | Target object processing method and plasma processing apparatus | Seiji Yokoyama, Taichi Okano, Shunichi Kawasaki, Toshifumi Nagaiwa | 2023-03-21 |
| 11328934 | Etching method and substrate processing apparatus | Wakako Ishida | 2022-05-10 |
| 11211229 | Processing method and plasma processing apparatus | Seiji Yokoyama, Taichi Okano, Shunichi Kawasaki | 2021-12-28 |