Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610766 | Target object processing method and plasma processing apparatus | Seiji Yokoyama, Taichi Okano, Sho OIKAWA, Shunichi Kawasaki | 2023-03-21 |
| 11342165 | Plasma processing method | — | 2022-05-24 |
| 11264208 | Plasma processing apparatus and method for controlling radio-frequency power supply of plasma processing apparatus | — | 2022-03-01 |
| 11171007 | Plasma processing apparatus and plasma etching method | — | 2021-11-09 |
| 10991551 | Cleaning method and plasma processing apparatus | Mohd Fairuz BIN BUDIMAN, Shinya Morikita | 2021-04-27 |
| 10714318 | Plasma processing method | — | 2020-07-14 |
| 9059103 | Processing method and storage medium | Wataru Shimizu, Kiyoshi Maeda | 2015-06-16 |
| 8277673 | Plasma processing method and apparatus | Hiroshi Tsujimoto, Yuji Otsuka | 2012-10-02 |
| 7732340 | Method for adjusting a critical dimension in a high aspect ratio feature | Junichi Sasaki, Stefan Sawusch | 2010-06-08 |
| 6723202 | Worktable device and plasma processing apparatus for semiconductor process | Shuei Sekizawa, Kosuke Imafuku, Jun Ooyabu | 2004-04-20 |