Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721595 | Processing method and plasma processing apparatus | Sho OIKAWA, Seiji Yokoyama, Taichi Okano | 2023-08-08 |
| 11610766 | Target object processing method and plasma processing apparatus | Seiji Yokoyama, Taichi Okano, Sho OIKAWA, Toshifumi Nagaiwa | 2023-03-21 |
| 11211229 | Processing method and plasma processing apparatus | Sho OIKAWA, Seiji Yokoyama, Taichi Okano | 2021-12-28 |
| 5038270 | Method for controlling reactor system | Yoichi Tozawa, Hitoshi Matsuo, Morimasa Ogawa, Genichi Emoto | 1991-08-06 |