Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8512510 | Plasma processing method and apparatus | Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki +4 more | 2013-08-20 |
| 8109288 | Flow rate control system and shower plate used for partial pressure control system | Hideki Nagaoka, Hiroshi Koizumi, Tsuyoshi Shimazu, Hiroki Endo, Keiki Ito +1 more | 2012-02-07 |
| 7882800 | Ring mechanism, and plasma processing device using the ring mechanism | Akira Koshiishi, Mitsuru Hashimoto, Hideaki Tanaka, Shigeru Tahara, Kunihiko Hinata | 2011-02-08 |
| 7658816 | Focus ring and plasma processing apparatus | Akira Koshiishi, Hideaki Tanaka, Nobuyuki Okayama, Masaaki Miyagawa, Shunsuke Mizukami +5 more | 2010-02-09 |
| 7506610 | Plasma processing apparatus and method | Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki +4 more | 2009-03-24 |
| 7494561 | Plasma processing apparatus and method, and electrode plate for plasma processing apparatus | Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki +4 more | 2009-02-24 |
| 7481240 | Partial pressure control system, flow rate control system and shower plate used for partial pressure control system | Hideki Nagaoka, Hiroshi Koizumi, Tsuyoshi Shimazu, Hiroki Endo, Keiki Ito +1 more | 2009-01-27 |
| 6723202 | Worktable device and plasma processing apparatus for semiconductor process | Toshifumi Nagaiwa, Shuei Sekizawa, Kosuke Imafuku | 2004-04-20 |
| 6576860 | Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate | Chishio Koshimizu, Hideki Takeuchi, Akira Koshiishi | 2003-06-10 |
| 6426477 | Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate | Chishio Koshimizu, Hideki Takeuchi, Akira Koshiishi | 2002-07-30 |
| 6072147 | Plasma processing system | Akira Koshiishi | 2000-06-06 |
| D412513 | Upper electrode for manufacturing semiconductors | — | 1999-08-03 |