Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8464741 | Flow control method for multizone gas distribution | — | 2013-06-18 |
| 7732340 | Method for adjusting a critical dimension in a high aspect ratio feature | Toshifumi Nagaiwa, Junichi Sasaki | 2010-06-08 |