Issued Patents All Time
Showing 51–65 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504745 | Method for processing target object | Toru Hisamatsu, Masanobu Honda | 2019-12-10 |
| 10475659 | Method of processing target object | Masahiro Tabata | 2019-11-12 |
| 10460963 | Plasma processing method | Shuhei Ogawa, Wanjae Park, Masanobu Honda | 2019-10-29 |
| 10381236 | Method of processing target object | Toru Hisamatsu, Masahiro Tabata | 2019-08-13 |
| 10233535 | Plasma processing apparatus and plasma processing method | Masanobu Honda, Toru Hisamatsu | 2019-03-19 |
| 10217643 | Method of processing target object | Masahiro Tabata | 2019-02-26 |
| 9911622 | Method of processing target object | Toru Hisamatsu, Tomoyuki Oishi, Masanobu Honda | 2018-03-06 |
| 9911607 | Method of processing target object | Toru Hisamatsu | 2018-03-06 |
| 9859126 | Method for processing target object | Tomoyuki Oishi, Toru Hisamatsu | 2018-01-02 |
| 9721766 | Method for processing target object | Toru Hisamatsu, Masanobu Honda, Tomoyuki Oishi | 2017-08-01 |
| 9607811 | Workpiece processing method | Toru Hisamatsu, Masanobu Honda | 2017-03-28 |
| 9583361 | Method of processing target object and plasma processing apparatus | Hiromi Mochizuki, Masanobu Honda, Masaya Kawamata, Ken Kobayashi, Ryoichi Yoshida | 2017-02-28 |
| 9502219 | Plasma processing method | Masaya Kawamata, Toshio Haga | 2016-11-22 |
| 9330935 | Plasma etching method and plasma etching apparatus | Toru Hisamatsu, Masanobu Honda | 2016-05-03 |
| 7326650 | Method of etching dual damascene structure | Shin Okamoto, Koichiro Inazawa, Tomoki Suemasa | 2008-02-05 |