Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9887109 | Plasma etching method and plasma etching apparatus | Masanobu Honda, Kazuhiro Kubota | 2018-02-06 |
| 9583361 | Method of processing target object and plasma processing apparatus | Yoshihide Kihara, Hiromi Mochizuki, Masanobu Honda, Ken Kobayashi, Ryoichi Yoshida | 2017-02-28 |
| 9502219 | Plasma processing method | Yoshihide Kihara, Toshio Haga | 2016-11-22 |
| 9460893 | Substrate processing apparatus | Masanobu Honda, Kazuhiro Kubota | 2016-10-04 |
| 9349619 | Plasma etching method and plasma etching apparatus | Masanobu Honda, Kazuhiro Kubota | 2016-05-24 |
| 9202707 | Semiconductor device manufacturing method | Masanobu Honda | 2015-12-01 |